Compact 6-axis Manipulator SMR Series

Positioning error will be increased each time we assemble stages. But our stages are designed and assembled with considering very good stiffness. Then, even if total 6 axes are assembled, the stages could keep the high accuracy and stiffness.

Used for many production equipment for camera module in mobile phone.
Used for production of high precision camera module with more than 20 million pixels.
Positionings of sub-microns and angle seconds for alignment of CMOS sensor and lens are realizable.
Suitable for the assembly of on-board camera module required higher precision in future.

Specification

Axis	Motion Range	MAX Speed	Minimum Resolution
X	?3mm	10mm/sec	1?m
Y
Z	?2.5mm	1.25mm/sec	0.125?m
?x	?5?	11.3?/sec	?0.000378?
?y	?4.5?	8.5?/sec	?0.000282?
?z	?3?	12.7?/sec	0.00127?