Compact 6-axis Manipulator USM Series

Ultra-Compact 6-Axis Manipulator

The new KOHZU 6-Axis Manipulator is a culminationof our extensive expertise in production and analysis equipment.

?Size and weight have been reduced while maintaining high accuracy and rigidity!
?High precision ball screw drives for all axes ensure a long performance life!

1. Centralized Connector Unit

The 6-axis motor and sensor wiring are concentrated in one location to make even complicated multi-axis wiring work easy (can also be removed if not needed).

2. Compact and Lightweight

Lightweight design (approx.3kg) enables installation on highspeed carrier shafts.

3. High Tracking

Positioning i s completed according to highly accurate commands thanks to tracking in sub-micron units for straight lines or within seconds for angles.
Example: The graph below shows tracking data for one pulse of the swivel stage. Error is within ?0.0002 degrees for 0.000797 degrees.

Specification

Axis	Motion Range	Max Speed	Minimum Resoluton	Micro-Step(div)
X	?3mm	10mm/sec	0.1?m	1/20
Y	?3mm	10mm/sec	0.1?m	1/20
Z	?1.5mm	2.5mm/sec	0.25?m	1/2
?	?3?	12.7?/sec	0.00127?	1/2
?	?3?	9.6?/sec	?0.00064?	1/2
?	?3?	12?/sec	?0.00079?	1/2

?Minimum resolution can be changed according to the number of driver divisions.