| Model Number | XM16F-C1 |
|---|---|
| Mirror Model Number | XM16F-C1-R |
| Table Size | 160mm??160mm |
| Guide Mechanism | Cross-Roller Guide |
| Motion Range | ??12.5mm |
| Straightness | ?Q2??m/25mm |
| Minimum Readout | 10??m |
| Moment Load Stiffness | 0.02 arcsec/N?cm |
| Load Capacity | 392N (40kgf) |
| Material | Steel |
| Finishing | Nickel Plating |
| Weight | 5.8kg |
| Perpendicularity | - |
| Actuator | Micrometer (25mm) |