| Model Number | XM07F-C3-CL |
|---|---|
| Mirror Model Number | XM07F-C3-R-CL |
| Table Size | 70mm??70mm |
| Guide Mechanism | Cross-Roller Guide |
| Motion Range | Coarse 13mm, Fine 0.3mm |
| Straightness | ?Q2??m/13mm |
| Minimum Readout | Coarse 10??m/div, Fine 0.5??m/div |
| Moment Load Stiffness | 0.08 arcsec/N?cm |
| Load Capacity | 117.6N (12kgf) |
| Material | Steel |
| Finishing | Nickel Plating |
| Weight | 0.96kg |
| Perpendicularity | - |
| Actuator | Fine Pitch Positioner FPP03-13(13mm) |