| Model Number | XM16A-S1 |
|---|---|
| Mirror Model Number | XM16A-S1-R |
| Table Size | 160mm??160mm |
| Guide Mechanism | Cross-Roller Guide |
| Motion Range | ??12.5mm |
| Straightness | ?Q2??m/25mm |
| Minimum Readout | 10??m |
| Moment Load Stiffness | 0.03 arcsec/N?cm |
| Load Capacity | 196N (20kgf) |
| Material | Aluminum Alloy |
| Finishing | Clear-Matt Anodizing |
| Weight | 2.7kg |
| Perpendicularity | - |
| Actuator | Micrometer (25mm) |