| Model Number | XM05A-S3-CL |
|---|---|
| Mirror Model Number | XM05A-S3-R-CL |
| Table Size | 50mm??50mm |
| Guide Mechanism | Cross-Roller Guide |
| Motion Range | Coarse 13mm, Fine 0.3mm |
| Straightness | ?Q2??m/13mm |
| Minimum Readout | Coarse 10??m/div, Fine 0.5??m/div |
| Moment Load Stiffness | 0.31 arcsec/N?cm |
| Load Capacity | 39.2N (4kgf) |
| Material | Aluminum Alloy |
| Finishing | Clear-Matt Anodizing |
| Weight | 0.3kg |
| Perpendicularity | - |
| Actuator | Fine Pitch Positioner FPP03-13(13mm) |