| Model Number | XA10F-R201 | 
|---|---|
| Mirror Model Number | XA10F-R201-R | 
| Table Size | 100mm??100mm | 
| Guide Mechanism | Cross-Roller Guide | 
| Motion Range | ??12.5mm | 
| Lead Mechanism | Ball Screw, Lead 1.0mm | 
| Resolution??Full/Half Step | 1??m/0.5??m | 
| Resolution??Micro Step (1/20 div) | 0.05??m | 
| Maximum Speed | 5mm/sec | 
| Accumulated Lead Error | ?Q5??m/25mm | 
| Repeatability | ?Q??0.2??m | 
| Lost Motion | ?Q0.5??m | 
| Straightness (Horizontal) | ?Q0.5??m/25mm | 
| Straightness (Vertical) | ?Q1??m/25mm | 
| Backlash | ?Q0.5??m | 
| Moment Load Stiffness | 0.01 arcsec/N?cm | 
| Load Capacity | 196N (20kgf) | 
| Material | Steel | 
| Finishing | Nickel Plating | 
| Weight | 2.75kg | 
| Perpendicularity | ?? |