| Model Number | XA16F-L23 | 
|---|---|
| Mirror Model Number | XA16F-L23-R | 
| Table Size | 160mm??160mm | 
| Guide Mechanism | Linear Guide | 
| Motion Range | ??150mm | 
| Lead Mechanism | Ball Screw, Lead 5.0mm | 
| Resolution??Full/Half Step | 10??m/5??m | 
| Resolution??Micro Step (1/20 div) | 0.5??m | 
| Maximum Speed | 50mm/sec | 
| Accumulated Lead Error | ?Q20??m/300mm | 
| Repeatability | ?Q??0.5??m | 
| Lost Motion | ?Q5??m | 
| Straightness (Horizontal) | ?Q5??m/300mm | 
| Straightness (Vertical) | ?Q5??m/300mm | 
| Backlash | ?Q2??m | 
| Moment Load Stiffness | 0.02 arcsec/N?cm | 
| Load Capacity | 392N (40kgf) | 
| Material | Steel (Table: Aluminum Alloy) | 
| Finishing | Matt Black | 
| Weight | 18.2kg |