| Model Number | ZM10A-C3C | 
|---|---|
| Mirror Model Number | ZM10A-C3C-R | 
| Table Size | 100mm??100mm | 
| Guide Mechanism | Cross-Roller Guide | 
| Motion Range | ??1.5mm | 
| Verticalness | ?Q3??m/3mm | 
| Minimum Readout | Coarse 2.5??m/div, Fine 0.125??m/div | 
| Load Capacity | 68.6N (7kgf) | 
| Material | Aluminum Alloy | 
| Finishing | Clear-Matt Anodizing | 
| Weight | 2.1kg | 
| Actuator | Fine Pitch Positioner FPP03-13(13mm) |