| Model Number | YM16F-S1 | 
|---|---|
| Mirror Model Number | YM16F-S1-RRR | 
| Table Size | 160mm??160mm | 
| Guide Mechanism | Cross-Roller Guide | 
| Motion Range | ??12.5mm | 
| Straightness | ?Q2??m/25mm | 
| Minimum Readout | 10??m | 
| Moment Load Stiffness | 0.04 arcsec/N?cm | 
| Load Capacity | 333.2N (34kgf) | 
| Material | Steel | 
| Finishing | Nickel Plating | 
| Weight | 10.8kg | 
| Perpendicularity | ?Q20??m/25mm | 
| Actuator | Micrometer (25mm) |