| Model Number | XM05A-S3-CL | 
|---|---|
| Mirror Model Number | XM05A-S3-R-CL | 
| Table Size | 50mm??50mm | 
| Guide Mechanism | Cross-Roller Guide | 
| Motion Range | Coarse 13mm, Fine 0.3mm | 
| Straightness | ?Q2??m/13mm | 
| Minimum Readout | Coarse 10??m/div, Fine 0.5??m/div | 
| Moment Load Stiffness | 0.31 arcsec/N?cm | 
| Load Capacity | 39.2N (4kgf) | 
| Material | Aluminum Alloy | 
| Finishing | Clear-Matt Anodizing | 
| Weight | 0.3kg | 
| Perpendicularity | - | 
| Actuator | Fine Pitch Positioner FPP03-13(13mm) |