| Model Number | XM16A-S1 | 
|---|---|
| Mirror Model Number | XM16A-S1-R | 
| Table Size | 160mm??160mm | 
| Guide Mechanism | Cross-Roller Guide | 
| Motion Range | ??12.5mm | 
| Straightness | ?Q2??m/25mm | 
| Minimum Readout | 10??m | 
| Moment Load Stiffness | 0.03 arcsec/N?cm | 
| Load Capacity | 196N (20kgf) | 
| Material | Aluminum Alloy | 
| Finishing | Clear-Matt Anodizing | 
| Weight | 2.7kg | 
| Perpendicularity | - | 
| Actuator | Micrometer (25mm) |