| Model Number | YM07F-S3-CL | 
|---|---|
| Mirror Model Number | YM07F-S3-RRR-CL | 
| Table Size | 70mm??70mm | 
| Guide Mechanism | Cross-Roller Guide | 
| Motion Range | Coarse 13mm, Fine 0.3mm | 
| Straightness | ?Q2??m/13mm | 
| Minimum Readout | Coarse 10??m/div, Fine 0.5??m/div | 
| Moment Load Stiffness | 0.16 arcsec/N?cm | 
| Load Capacity | 107.8N (11kgf) | 
| Material | Steel | 
| Finishing | Nickel Plating | 
| Weight | 1.92kg | 
| Perpendicularity | ?Q20??m/13mm | 
| Actuator | Fine Pitch Positioner FPP03-13(13mm) |